Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition, A. Haridas Choolakkal, P. Niiranen, S. Dorri, J. Birch, H. Pedersen, Nature Communication 15, 10667 (2024), https://doi.org/10.1038/s41467-024-55007-1
Competitive co-diffusion as a route to enhanced step coverage in chemical vapor deposition, A. Haridas Choolakkal, P. Niiranen, S. Dorri, J. Birch, H. Pedersen, Nature Communication 15, 10667 (2024), https://doi.org/10.1038/s41467-024-55007-1